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    2021-1-16 · Silicon nitride is stable in oxidizing atmospheres, making it useful as a mask for diffusion and for silicon oxida-tion (see the 'LOCOS' process, discussed in Section 2.3.1). Like oxide films, thin-film stoichiometric silicon nitride, Si3N 4, is amorphous and has a high resistivity (>1013 W-m) and low thermal conductivity.

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